6G硅基太赫兹芯片及系统关键技术进展

摘要：太赫兹频段拥有丰富的频谱资源，是6G通信与高精度感知系统的重要支撑频段。硅基工艺凭借高集成度、低成本和大带宽优势，已成为推动太赫兹通信与雷达系统走向实用化的关键技术途径。围绕100~300 GHz关键频段，系统综述了硅基太赫兹芯片及系统在通信与雷达两个方向的近期研究进展，并介绍了东南大学毫米波太赫兹技术团队的近期研究成果。在芯片层面，沿信号源、放大器、变频器及收发机四条主线，梳理了高功率倍频链、宽带功率合成、低本振谐波混频及多通道收发阵列等核心电路的关键突破。在系统层面，介绍了220 GHz大功率发射阵列和传输验证，300 GHz 5发5收多输入多输出（MIMO）系统，以及微型220 GHz大视场高精度调频连续波（FMCW）成像雷达系统。上述进展表明，硅基太赫兹系统在通信速率、覆盖距离、感知精度和成像速度等关键指标上已取得显著突破，为太赫兹技术从实验室走向实际应用奠定了基础。

关键词：太赫兹；硅基收发机；雷达系统；调频连续波；多输入多输出通信；高分辨成像系统

Abstract: The terahertz (THz) band, with its abundant spectral resources, has become a critical supporting frequency band for 6G and high-precision sensing systems. Leveraging the advantages of high integration density, low cost, and wide bandwidth, silicon-based technologies have emerged as a key enabler for transitioning THz communication and radar systems from laboratory prototypes to practical engineering applications. Focusing on the 100–300 GHz frequency range, the recent research progress of silicon-based THz chips and systems in both communication and radar domains is systematically reviewed, and the recent research achievements of the millimeter-wave and THz technology team at Southeast University are presented. At the chip level, key breakthroughs in core circuits, including high-power frequency multiplier chains, broadband power combining, low-local-oscillator (LO) harmonic mixing, and multi-channel transceiver arrays, are summarized along four main technology threads: signal sources, amplifiers, frequency converters, and transceivers. At the system level, a 220 GHz high-power transmit array with transmission verification, a 300 GHz 5-transmitter 5-receiver (5T5R) multiple-input multiple-output (MIMO) system, and a miniature 220 GHz large-field-of-view high-precision frequency-modulated continuous-wave (FMCW) imaging radar system are introduced in ·detail. These advances demonstrate that silicon-based THz systems have achieved significant breakthroughs in key metrics such as communication data rate, coverage distance, sensing accuracy, and imaging speed, laying a solid foundation for the transition of THz technology from laboratory research to real-world applications.

Keywords：terahertz; silicon-based transceiver; radar system; frequency-modulated continuous wave; MIMO communication; high resolution imaging system