新型硅基集成光隔离器的研究进展

新型硅基集成光隔离器的研究进展

李明轩1,2，于丽娟1，刘建国1，2

1. 中国科学院半导体研究所
2. 中国科学院大学

摘要：光隔离器是保障光通信系统稳定运行的重要核心器件。目前，光通信器件在单个芯片上的集成是必然趋势，但光隔离器的集成仍然存在损耗高、隔离度差、集成工艺困难等诸多问题，复杂有源光通信器件片上集成的发展也因此受到了阻碍。概述了实现光隔离的几种有效方案，介绍了硅基集成光隔离器的最新研究进展，并对其未来的发展态势进行了展望。
关键词：光学器件；硅基集成；非互易器件；光隔离器；波导结构

Research Progress of New Silicon-Based Integrated Optical Isolators

LI Mingxuan1,2, YU Lijuan1, LIU Jianguo1,2

1. Institution of Semiconductors, Chinese Academy of Sciences
2. University of Chinese Academy of Sciences

Abstract: Optical isolators are core devices to ensure the stable operation of optical communication systems. At present, the integration of optical communication devices on a single chip is an inevitable trend, but there are still some serious problems in the integration of isolators such as high loss, poor isolation, and difficult integrating process, which have hindered the development of on-chip integration of complex active optical communications devices. This paper outlines several effective solutions for optical isolation, introduces the latest research progress of silicon-based integrated optical isolators, and forecasts its future development.
Keywords: optical device; silicon-based integration; non-reciprocal device; optical isolators; waveguide structure